Sound test device for, and a method of, testing a dut, in particular a mems microphone

Abstract

A sound test device for testing a DUT in particular a MEMS microphone, comprises a sound chamber a socket unit and a sound generator unit, wherein the sound generator unit includes a speaker comprising a speaker membrane, an opening, and a reference microphone comprising a microphone membrane wherein the opening is adapted to receive a DUT opening of the DUT and wherein the microphone membrane and the opening are arranged to opposing each other, and the socket unit includes the at least one contact element being adapted to contact to a contact terminal of the DUT, and wherein the sound chamber is limited by the speaker membrane, the microphone membrane, and the opening.

Dependencies are inferred from the claim text.