Window logic for control of polishing process

A method of controlling a chemical mechanical polishing system, comprising:

• for each respective test substrate of a plurality of test substrates, receiving a respective time-varying test signal from an endpoint detection system during chemical mechanical polishing of the respective test substrate, thus providing a plurality of time varying test signals;
• simultaneously visually displaying the plurality of time-varying test signals from the plurality of test substrates on a display with the plurality of time-varying test signals overlaid on each other in a graph;
• receiving user input selecting a box providing a defined time range and defined signal value range;
• providing the plurality of time-varying test signals and the time range and signal value range to an algorithm and identifying by the algorithm a boundary crossing logic function in the defined time range and defined signal value range;
• during chemical mechanical polishing of a device substrate, monitoring the device substrate with the endpoint detection system to generate a time-varying signal;
• evaluating whether the time-varying signal in the defined time range satisfies the identified boundary crossing logic function;
• and
• basing an endpoint determination on whether the time-varying signal satisfies the identified boundary crossing logic function.

A method of controlling a chemical mechanical polishing system, comprising:

• for each respective test substrate of a plurality of test substrates, receiving a respective time-varying test signal from an endpoint detection system during chemical mechanical polishing of the respective test substrate, thus providing a plurality of time varying test signals;
• simultaneously visually displaying the plurality of time-varying test signals from the plurality of test substrates on a display with the plurality of time-varying test signals overlaid on each other in a graph;
• receiving user input selecting an initial box providing a defined time range and defined signal value range;
• through a visual user interface element, receiving a selection of one from a preset group of boundary crossing logic functions to provide a selected boundary crossing logic function;
• providing the plurality of time-varying test signals and the time range and signal value range to an algorithm and identifying by the algorithm an updated time range and/or an updated signal value range;
• during chemical mechanical polishing of a device substrate, monitoring the device substrate with the endpoint detection system to generate a time-varying signal;
• evaluating whether the time-varying signal in the updated time range satisfies the identified boundary crossing logic function;
• and
• basing an endpoint determination on whether the time-varying signal satisfies the identified boundary crossing logic function.

A computer-readable medium tangibly storing instructions that, when executed by one or more processors of a computing device, cause the one or more processors to perform operations comprising:

• for each respective test substrate of a plurality of test substrates, receiving a respective time-varying test signal from an endpoint detection system during chemical mechanical polishing of the respective test substrate, thus providing a plurality of time varying test signals;
• simultaneously visually displaying the plurality of time-varying test signals from the plurality of test substrates on a display with the plurality of time-varying test signals overlaid on each other in a graph;
• receiving user input selecting a box having a defined time range and defined signal value range;
• and
• through a visual user interface element, receiving a selection of one from a preset group of boundary crossing logic functions to provide a selected boundary crossing logic function to generate a set of;.