Method of forming truer
AssigneeTokyo Seimitsu Co., Ltd.
InventorsShinichi KISHISHITA, Masaki ISHII
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AssigneeTokyo Seimitsu Co., Ltd.
InventorsShinichi KISHISHITA, Masaki ISHII
Estimating the term…
A method of forming a truer in a truing where a groove of a grinding wheel used for grinding a chamfer portion of a wafer is formed by a truer having a disc-shape, wherein the method comprising: a process A for adjusting a diameter and a rough shape of the truer by a master grinding wheel for forming the truer; and a process B for forming an edge of the truer into a target shape, wherein the process A and the process B are performed by a plurality of master grooves having different shapes from each other, the plurality of master grooves being provided with the master grinding wheel or the process A and the process B are performed by a plurality of portions having different shapes from each other in at least one of the plurality of master grooves provided with the master grinding wheel.
A method of forming a truer in a truing where a groove of a grinding wheel used for grinding a chamfer portion of a wafer is formed by a truer having a disc-shape, wherein
A master grinding wheel of forming a truer for forming a groove of a grinding wheel used for grinding a chamfer portion of a wafer, the master grinding wheel comprising:
A master grinding wheel of forming a truer for forming a groove of a grinding wheel used for grinding a chamfer portion of a wafer, wherein
Dependencies are inferred from the claim text.