A quality inspection system for an entire inkjet printing manufacturing process for display devices, wherein the system comprises a substrate inspection module, a nozzle inspection module, an ink droplet inspection module, a coating thickness inspection module and a control module, wherein
- the substrate inspection module comprises a large-field downward-view unit, a high-magnification downward-view unit and a high-resolution vision unit, wherein the large-field downward-view unit and the high-magnification downward-view unit are all arranged on a first moving part with Y2 and Z2 degrees of freedom, that is, a second horizontal longitudinal degree of freedom, and a second vertical degree of freedom, and are respectively configured for performing coarse positioning inspection and fine positioning inspection on a substrate before inkjet printing;
- the high-resolution vision unit is arranged on a second moving part with Y1 and Z1 degrees of freedom, that is, a first horizontal longitudinal degree of freedom, and a first vertical degree of freedom, and is configured for performing visual quality inspection on the substrate before inkjet printing, a liquid coating or a cured coating sprayed onto the substrate;
- the nozzle inspection module comprises a large-field upward-view unit and a high-magnification upward-view unit, wherein the large-field upward-view unit and the high-magnification upward-view unit are all arranged on a third moving part with X1 degree of freedom, that is, a first horizontal degree of freedom, and are respectively configured for performing positioning inspection and visual quality inspection on a print head used for performing inkjet printing;
- the ink droplet inspection module comprises two sets of horizontal vision units arranged at an angle α, wherein the two sets of horizontal vision units work synchronously to form a binocular vision system, which is arranged on a fourth moving part with X2 degree of freedom, that is, a second horizontal degree of freedom, and is configured for performing a real-time visual inspection on a volume, a velocity, an angle and a shape of a flying ink droplet sprayed by the print head;
- the coating thickness inspection module comprises a set of white light interference vision unit, which is arranged in the same way as the high-resolution vision unit on the second moving part with Y1 and Z1 degrees of freedom, that is, the first horizontal longitudinal degree of freedom and the first vertical degree of freedom, and is configured for performing the real-time visual inspection on a coating thickness, a volume and an uniformity of the ink sprayed onto the substrate before and after curing;
- the control module comprises a real-time processing controller, a motion controller, a synchronous trigger control card, and an inkjet control card, wherein the motion controller is connected to the substrate inspection module, the nozzle inspection module, the ink droplet inspection module and the coating thickness inspection module respectively, control movements of these modules and obtaining position feedback information;
- the inkjet control card is configured to control the on/off of the nozzle and set a driving waveform, thereby controlling the nozzle to spray and output a triggering signal to the synchronous trigger control card;
- the synchronous trigger control card receives the triggering signal and delays triggering an operation of the ink droplet inspection module, thereby performing a real-time inspection on the volume, the velocity, the angle and the shape of the flying ink droplet;
- the real-time processing controller is connected to the substrate inspection module, the nozzle inspection module, the ink droplet inspection module and the coating thickness inspection module respectively, thereby controlling the above modules to work and obtain corresponding image data for processing, so as to obtain multiple inspection results comprising substrate defects, nozzle defects, liquid coating defects, and cured coating defects;
- the real-time processing controller is also connected to the motion controller, the synchronous trigger control card and the inkjet control card respectively, forming a closed-loop control on the entire inkjet printing manufacturing process of the display device.