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US 2023/0414958 A1Published application
Plasma treatment apparatus
AssigneeFeagle Co., Ltd
InventorsHyunyoung LEE, Jeonghae CHOI, Yeonsuk SONG
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Abstract
Disclosed is a plasma treatment apparatus that includes a cover attached to a body part, a plasma generation unit that generates plasma and provides the plasma to the cover, a gas supply unit that supplies a source gas for generating the plasma to the plasma generation unit, and an exhaust unit that exhausts an exhaust gas from the cover. The cover comprises, at an edge, a sealing part brought into close contact with the body part to seal a space between the cover and the body part.
Claims20
A plasma treatment apparatus comprising:
- a cover configured to be attached to a body part;
- a plasma generation unit configured to generate plasma and provide the plasma to the cover;
- a gas supply unit configured to supply a source gas for generating the plasma to the plasma generation unit;
- an exhaust unit configured to exhaust an exhaust gas from the cover;
- and
- a spacing part disposed on a portion of the cover facing the body part, the spacing part being configured to maintain spacing between the cover and the body part.
3 more elements
Dependencies are inferred from the claim text.