Piezoelectric film laminated body and manufacturing method of the same
AssigneesDenso Corporation, Toyota Jidosha Kabushiki Kaisha, MIRISE Technologies Corporation
InventorsAKIHIKO TESHIGAHARA, HIDEO YAMADA, RYUICHIRO ABE, KENJI KIJIMA, TETSUYA ENOMOTO
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Abstract
A piezoelectric film laminated body includes a base member and a scandium-containing aluminum nitride film. The base member has a base surface. The scandium-containing aluminum nitride film is disposed in contact with the base surface of the base member. A surface roughness of the base surface is 0.5 nm or less in arithmetic average roughness.
Claims13
A piezoelectric film laminated body comprising:
- a base member having a base surface;
- and
- a scandium-containing aluminum nitride film disposed in contact with the base surface, wherein
- a surface roughness of the base surface is 0.5 nm or less in arithmetic average roughness.
A manufacturing method of a piezoelectric film laminated body, comprising:
- preparing a base member having a base surface;
- planarizing the base surface;
- and
- forming a scandium-containing aluminum nitride film in contact with the base surface after planarizing the base surface, wherein
- the planarizing the base surface is performed such that a surface roughness of the base surface is 0.5 nm or less in arithmetic average roughness.
A manufacturing method of a piezoelectric film laminated body, comprising:
- preparing a conductive member having a surface;
- planarizing the surface of the conductive member;
- forming a base member in contact with the surface of the conductive member after planarizing the surface, the base member having a base surface;
- and
- forming a scandium-containing aluminum nitride film in contact with the base surface, wherein
- the planarizing the conductive member is performed such that a surface roughness of the surface of the conductive member is 0.5 nm or less in arithmetic average roughness, so that a surface roughness of the base surface of the base member formed on the conductive member is 0.5 nm or less in arithmetic average roughness.
Dependencies are inferred from the claim text.