Evaporation device and evaporation method
AssigneeJapan Display Inc.
InventorAtsushi TAKEDA
Life of this patent
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Abstract
According to one embodiment, an evaporation device includes a first chamber group including a plurality of evaporation chambers arranged in line in a first conveyance direction, a second chamber group including a plurality of evaporation chambers arranged in line in a second conveyance direction, a first rotation chamber which is connected to a first evaporation chamber located at a upstream position in the first conveyance direction and a second evaporation chamber located at a downstream position in the second conveyance direction, and a second rotation chamber which is connected to a third evaporation chamber located at a downstream position in the first conveyance direction and a fourth evaporation chamber located at a upstream position in the second conveyance direction.
Claims16
An evaporation device comprising:
- a first chamber group comprising a plurality of evaporation chambers which are arranged in line in a first conveyance direction in which a processing substrate is conveyed;
- a second chamber group comprising a plurality of evaporation chambers which are arranged in line in a second conveyance direction which is an opposite direction of the first conveyance direction;
- a first rotation chamber which is connected to a first evaporation chamber located at a most upstream position in the first conveyance direction in the first chamber group and a second evaporation chamber located at a most downstream position in the second conveyance direction in the second chamber group, and rotates the processing substrate carried out of the second evaporation chamber to carry the processing substrate into the first evaporation chamber;
- and
- a second rotation chamber which is connected to a third evaporation chamber located at a most downstream position in the first conveyance direction in the first chamber group and a fourth evaporation chamber located at a most upstream position in the second conveyance direction in the second chamber group, and rotates the processing substrate carried out of the third evaporation chamber to carry the processing substrate into the fourth evaporation chamber.
An evaporation method comprising:
- preparing a processing substrate by forming a lower electrode above a substrate, forming a rib comprising an aperture overlapping the lower electrode, and forming a partition including a lower portion located on the rib and an upper portion located on the lower portion and protruding from a side surface of the lower portion;
- and
- carrying the processing substrate in an evaporation device without providing a mask, forming an organic layer, forming an upper electrode on the organic layer, and carrying the processing substrate out of the evaporation device, wherein
- in the evaporation device, the processing substrate which is carried in
- passes through a first rotation chamber,
- goes through a first chamber group comprising a plurality of evaporation chambers arranged in line in a first conveyance direction,
- is rotated 180° in a second rotation chamber,
- goes through a second chamber group comprising a plurality of evaporation chambers arranged in line in a second conveyance direction which is an opposite direction of the first conveyance direction,
- is rotated 180° in the first rotation chamber,
- goes through the first chamber group,
- is rotated 180° in the second rotation chamber,
- goes through the second chamber group, and
- passes through the first rotation chamber and is carried out of the evaporation device, and
- in the processing substrate which is carried out of the evaporation device, the organic layer and the upper electrode formed on the partition are spaced apart from the organic layer and the upper electrode formed on the lower electrode in the aperture.
Dependencies are inferred from the claim text.