US 2023/0413446 A1 · DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER SOURCE

Abstract

A method includes causing, by a computing system comprising at least one processing device, a diagnostic disc placed within a processing chamber to generate sensor data of at least one component of the processing chamber using a set of non-contact sensors of the diagnostic disc, receiving, by the computing system, the sensor data from the diagnostic disc via a wireless connection established between the computing system and the diagnostic disc, determining, by the computing system based on the sensor data, whether at least one of alignment concentricity is skewed with respect to the at least one component, and in response to determining that at least one of alignment or concentricity is skewed with respect to the at least one component, initiating, by the computing system, correction of at least one of alignment or concentricity of the at least one component.

Claims20

Dependent claims

A diagnostic disc comprising:

a disc-shaped body comprising raised walls that encircle an interior of the disc-shaped body, wherein the raised walls of the disc-shaped body define a cavity of the disc-shaped body;
a plurality of non-contact sensors attached to the disc-shaped body;
a printed circuit board (PCB) positioned within the cavity on the disc-shaped body;
circuitry disposed on the PCB and coupled to each non-contact sensor of the plurality of non-contact sensors, the circuitry comprising at least a wireless communication circuit and a memory;
a power source disposed on the PCB;
a wireless charger disposed on the PCB;
and
a cover positioned over the cavity of the disc-shaped body, wherein the cover shields at least portions of the PCB, the circuitry, the power source, and the wireless charger within the cavity from an external environment.

5 more elements

A method comprising:

causing, by a computing system comprising at least one processing device, a diagnostic disc to generate sensor data of at least one component of a processing chamber using a plurality of non-contact sensors of the diagnostic disc;
receiving, by the computing system, the sensor data from the diagnostic disc via a wireless connection established between the computing system and the diagnostic disc;
determining, by the computing system based on the sensor data, whether at least one of alignment or concentricity is skewed with respect to the at least one component;
and
in response to determining that at least one of alignment or concentricity is skewed with respect to the at least one component, initiating, by the computing system, correction of at least one of alignment or concentricity of the at least one component.

2 more elements

Dependencies are inferred from the claim text.

Diagnostic disc with a high vacuum and temperature tolerant power source

Life of this patent

Diagnostic disc with a high vacuum and temperature tolerant power source

Life of this patent

Abstract

Claims20