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AssigneeBeijing Rslaser Opto-Electronics Technology Co., Ltd.
InventorsZebin FENG, Sai LIANG, Xiangyu XU, Rui JIANG, Guangyi LIU, Bin LIU, Pei CAO
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Disclosed in the present invention are an excimer laser energy model identification method and apparatus. The method comprises the following steps: establishing a gated recurrent network for excimer laser energy model identification; within a plurality of preset time periods, setting energy collection conditions in a single laser pulse mode, and collecting a training data set for excimer laser energy model identification; and using the training data set to train the established gated recurrent network, and when a training termination condition is satisfied, ending the training and obtaining an excimer laser energy model. By means of the method provided by the present invention, the maximum error between a pulse energy generated by the identified excimer laser energy model and an actual pulse energy is less than 1.5%, and thus, a simulation requirement of excimer laser energy characteristic control can be met.
An excimer laser energy model identification method, comprising the following steps:
An excimer laser energy model identification apparatus, comprising a processor and a memory, wherein the processor reads a computer program or instruction in the memory, and is configured to execute the following operations:
Dependencies are inferred from the claim text.