Simulation apparatus and storage medium
AssigneeCanon Kabushiki Kaisha
InventorsKEN KATSUTA, YUICHIRO OGUCHI
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AssigneeCanon Kabushiki Kaisha
InventorsKEN KATSUTA, YUICHIRO OGUCHI
Estimating the term…
A simulation apparatus that predicts a behavior of a curable composition in a film forming process includes a processor configured to execute behavior computation of the curable composition by a computational method selected from a first computational method and a second computational method which shortens a computation time as compared to the first computational method. The processor is configured to execute behavior computation of the curable composition by the second computational method while applying each of a plurality of tentative parameter sets for the film forming process, decide, from the plurality of tentative parameter sets, a parameter set that produces a result of the behavior computation satisfying a predetermined criterion for evaluation, and execute behavior computation of the curable composition by the first computational method while applying the decided parameter set.
A simulation apparatus that predicts a behavior of a curable composition in a film forming process in which a plurality of droplets of the curable composition arranged on a substrate and a mold are brought into contact with each other to form a film of the curable composition on the substrate, the apparatus comprising:
A simulation apparatus that predicts a behavior of a curable composition in a film forming process in which a plurality of droplets of the curable composition arranged on a substrate and a mold are brought into contact with each other to form a film of the curable composition on the substrate, the apparatus comprising:
A simulation apparatus that predicts a behavior of a curable composition in a film forming process in which a plurality of droplets of the curable composition arranged on a substrate and a mold are brought into contact with each other to form a film of the curable composition on the substrate, the apparatus comprising:
A simulation apparatus that predicts a behavior of a curable composition in a film forming process in which a plurality of droplets of the curable composition arranged on a substrate and a mold are brought into contact with each other to form a film of the curable composition on the substrate, the apparatus comprising:
Dependencies are inferred from the claim text.