Photonic system including micro ring modulator and method of using

A photonic system comprising:

• a waveguide;
• a micro ring modulator (MRM) spaced from the waveguide;
• a heater configured to increase a temperature of the MRM, wherein the heater comprises:
• at least one first doped region, wherein each first doped region of the at least one first doped region has a first dopant type;
• and
• at least one second doped region, wherein each second doped region of the at least one second doped region has a second dopant type opposite the first dopant type;
• and
• a cooling element configured to decrease a temperature of the MRM, wherein the cooling element comprises:
• a plurality of third doped regions, wherein each third doped region of the plurality of third doped regions has the first dopant type;
• and
• a plurality of fourth doped regions, wherein each fourth doped region of the plurality of fourth doped regions has the second dopant type.

A method of making a photonic system, the method comprises:

• etching a wafer to define a micro ring modulator (MRM) and a plurality of cooling structures;
• doping a first portion of the MRM with a first dopant having a first dopant type;
• doping a second portion of the MRM with a second dopant having a second dopant type different from the first dopant type;
• doping a first cooling structure of the plurality of cooling structures with a third dopant having the first dopant type;
• doping a second cooling structure of the plurality of cooling structures with a fourth dopant having the second dopant type;
• forming a first conductive element proximate the MRM;
• and
• forming a second conductive element electrically connected to the first cooling structure and the second cooling structure.