Heat exchanger for thermal control of heat producing devices
AssigneeMikros Manufacturing, Inc.
InventorsJesse D. McGowan, Lucas H. Rose, Timothy F. Ryan, Adam E. Sharp, Javier A. Valenzuela
Life of this patent
Estimating the term…
Loading patent…
AssigneeMikros Manufacturing, Inc.
InventorsJesse D. McGowan, Lucas H. Rose, Timothy F. Ryan, Adam E. Sharp, Javier A. Valenzuela
Estimating the term…
The present disclosure relates to a heat exchanger for thermal control of heat producing devices. In accordance with aspects and embodiments, this is achieved in the present design by placing a parallel flow path near the heat sink in the test head with a variable restriction in each flow path. The restrictions may be operated in a complementary manner to keep the fluid inertia in the main supply and return lines substantially constant. This arrangement results in a test head with higher cooling capacity and quicker response time than achievable with prior art semiconductor testing systems. The test head includes a pair of nested pneumatic actuators having non-circular pistons designed to provide Z axis motion and roll and tilt compliance. The pneumatic actuator assembly may be mounted on segmented flexures to provide X axis, Y axis and yaw compliance.
A thermal test head assembly comprising:
A thermal test head assembly comprising:
Dependencies are inferred from the claim text.