# US 2023/0408355 A1 · Sensor apparatus and robotic apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2023/0408355 A1 - Document ID: US20230408355A1 - Status: Published application - Kind: A1 - Application number: 18/252,402 - Filed: 2021-06-10 - Published: 2023-12-21 - Earliest claimed: 2020-11-17 - Assignees: Sony Group Corporation - Applicants: Sony Group Corporation - Inventors: Ken KOBAYASHI; Kei TSUKAMOTO; Yoshiaki SAKAKURA; Tetsuro GOTO; Akira EBISUI - Web page: https://patentgrep.com/patent/US20230408355A1 ## CPC - G01L 5/165: using variations in capacitance - B25J 13/082: {Grasping-force detectors (in general G01L5/16, G01L5/22)} - B25J 19/02: Sensing devices - G01L 1/142: {using capacitors} - G01L 1/146: {for measuring force distributions, e.g. using force arrays (G01L1/148 takes precedence)} - G01L 5/226: {to manipulators, e.g. the force due to gripping} - G01L 5/228: {using tactile array force sensors} - G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G) - B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50}) ## Abstract A sensor apparatus and a robotic apparatus that can detect a distribution of a shearing force. A sensor apparatus according to an embodiment of the present technology includes a sensor section, a separation layer, and a first viscoelastic body layer. The sensor section includes a first pressure sensor on a front side of the sensor section that faces and a second pressure sensor on a rear side of the sensor section, the sensor section detecting a force applied in an in-plane direction. The separation layer is between the first pressure sensor and the second pressure sensor, and is made of a viscoelastic material that is deformed by a load applied to the first pressure sensor. The first viscoelastic body layer is on a front surface of the first pressure sensor, and is made of a viscoelastic material that is deformable on the first pressure sensor in the in-plane direction. ## Claims ### Claim 1 A sensor apparatus, comprising: a sensor section that includes a first pressure sensor situated on a front side of the sensor section, and a second pressure sensor situated on a rear side of the sensor section, the first pressure sensor and the second pressure sensor facing each other, the sensor section detecting a force applied in an in-plane direction, on a basis of a pressure detection position, in the in-plane direction, at which pressure is detected by the first pressure sensor, and on a basis of a pressure detection position, in the in-plane direction, at which pressure is detected by the second pressure sensor; a separation layer that is arranged between the first pressure sensor and the second pressure sensor, the separation layer being made of a viscoelastic material that is deformed by a load applied to the first pressure sensor; and a first viscoelastic body layer that is arranged on a front surface of the first pressure sensor, the first viscoelastic body layer being made of a viscoelastic material that is deformable on the first pressure sensor in the in-plane direction. ### Claim 2 (depends on 1) The sensor apparatus according to claim 1, wherein the first viscoelastic body layer has a thickness that is equal to or less than a thickness of the separation layer. ### Claim 3 (depends on 1) The sensor apparatus according to claim 1, wherein the first viscoelastic body layer exhibits a degree of hardness that is equal to or lower than a degree of hardness that is exhibited by the separation layer. ### Claim 4 (depends on 1) The sensor apparatus according to claim 1, wherein a footprint of the first viscoelastic body layer with respect to the sensor section is equal to or smaller than a footprint of the separation layer with respect to the sensor section. ### Claim 5 (depends on 1) The sensor apparatus according to claim 1, wherein each of the first pressure sensor and the second pressure sensor includes a sensor electrode layer that includes a plurality of capacitive elements arranged in the in-plane direction, a reference electrode layer, and a deformation layer that is arranged between the sensor electrode layer and the reference electrode layer. ### Claim 6 (depends on 5) The sensor apparatus according to claim 5, wherein capacitive elements of the plurality of capacitive elements in the first pressure sensor are arranged in a matrix with first spacing on a surface of the sensor electrode layer in the first pressure sensor, and capacitive elements of the plurality of capacitive elements in the second pressure sensor are arranged in a matrix with second spacing on a surface of the sensor electrode layer in the second pressure sensor, the second spacing being larger than the first spacing. ### Claim 7 (depends on 5) The sensor apparatus according to claim 5, wherein the first viscoelastic body layer is made of a viscoelastic material that is more easily deformed in the in-plane direction than the deformation layer. ### Claim 8 (depends on 5) The sensor apparatus according to claim 5, further comprising a waterproof protection member that covers at least around the deformation layer. ### Claim 9 (depends on 8) The sensor apparatus according to claim 8, wherein the protection member further covers around the separation layer. ### Claim 10 (depends on 8) The sensor apparatus according to claim 8, wherein the protection member further covers around the first viscoelastic body layer. ### Claim 11 (depends on 1) The sensor apparatus according to claim 1, further comprising a second viscoelastic body layer that is arranged on a back surface of the second pressure sensor, the second viscoelastic body layer being made of a viscoelastic material that is deformable on the second pressure sensor in the in-plane direction. ### Claim 12 (depends on 11) The sensor apparatus according to claim 11, wherein the second viscoelastic body layer has a thickness that is equal to or less than a thickness of the first viscoelastic body layer. ### Claim 13 (depends on 1) The sensor apparatus according to claim 1, wherein at least one of the separation layer or the first viscoelastic body layer includes a plurality of pillar portions each being formed by gaps and extending in a direction vertical to the in-plane direction. ### Claim 14 (depends on 13) The sensor apparatus according to claim 13, wherein the gap is provided in the form of a groove that does not pass through the separation layer or the first viscoelastic body layer in the direction vertical to the in-plane direction. ### Claim 15 (depends on 13) The sensor apparatus according to claim 13, wherein the gap is provided in the form of a hole that passes through the separation layer or the first viscoelastic body layer in the direction vertical to the in-plane direction. ### Claim 16 (depends on 1) The sensor apparatus according to claim 1, wherein the sensor section further includes a computation element that calculates a distribution of a shearing force applied in the in-plane direction, on the basis of the pressure detection position, in the in-plane direction, at which pressure is detected by the first pressure sensor, and on the basis of the pressure detection position, in the in-plane direction, at which pressure is detected by the second pressure sensor. ### Claim 17 (depends on 16) The sensor apparatus according to claim 16, wherein the computation element determines whether there is a shearing force on a basis of whether an amount of shift caused in the in-plane direction between a first pressure center position and a second pressure center position reaches a value that is equal to or greater than a specified value, the first pressure center position being a position at which a pressure center is detected by the first pressure sensor, the second pressure center position being a position at which a pressure center is detected by the second pressure sensor. ### Claim 18 A robotic apparatus, comprising a sensor apparatus that includes a sensor section that includes a first pressure sensor situated on a front side of the sensor section, and a second pressure sensor situated on a rear side of the sensor section, the first pressure sensor and the second pressure sensor facing each other, the sensor section detecting a force applied in an in-plane direction, on a basis of a pressure detection position, in the in-plane direction, at which pressure is detected by the first pressure sensor, and on a basis of a pressure detection position, in the in-plane direction, at which pressure is detected by the second pressure sensor, a separation layer that is arranged between the first pressure sensor and the second pressure sensor, the separation layer being made of a viscoelastic material that is deformed by a load applied to the first pressure sensor, and a first viscoelastic body layer that is arranged on a front surface of the first pressure sensor, the first viscoelastic body layer being made of a viscoelastic material that is deformable on the first pressure sensor in the in-plane direction.