Heterodyne fiber interferometer displacement measuring system and method
AssigneeBeijing U-Precision Tech Co., Ltd.
InventorsGuohua SUN, Zhaokui CHENG, Shengli GUO
Life of this patent
Estimating the term…
Loading patent…
AssigneeBeijing U-Precision Tech Co., Ltd.
InventorsGuohua SUN, Zhaokui CHENG, Shengli GUO
Estimating the term…
A heterodyne fiber interferometer displacement measuring system, including a laser light source assembly for simultaneously emitting measuring light and reference light; a first photoelectric detector, a first fiber coupler, a fiber ferrule, a plano-convex lens, a first polarizing beam splitting prism, and a first reflecting device which are sequentially provided on an optical path of the measuring light on the basis of first single mode fibers; and a second photoelectric detector, a second fiber coupler, a collimator, a second polarizing beam splitting prism, and a second reflecting device which are sequentially provided on an optical path of the reference light on the basis of second single mode fibers. An object to be measured is fixed on the first reflecting device, the reference light and the measuring light are processed to form measurement and reference signals, and displacement information of the object is determined according to the measurement reference signals.
A heterodyne fiber interferometer displacement measuring system, comprising:
Dependencies are inferred from the claim text.