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US 2023/0407981 A1Published application
Self-adjustable variable orifice check valve for back pressure reduction
AssigneeApplied Materials, Inc.
InventorsMuhannad Mustafa, Sanjeev Baluja
Life of this patent
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Abstract
Variable orifice check valves comprising a flange with a guide pin, spring and movable plate are described. The flange has a body with at least one guide pin opening in the top surface. A guide pin is positioned within the at least one guide pin opening and a spring is positioned around the guide pin. The movable plate has an opening and slides along the guide pins with the spring between the top surface of the flange body and the bottom surface of the movable plate.
Claims20
A variable orifice check valve comprising:
- a flange having a body with a top surface and a bottom surface defining a thickness of the flange body, an outer peripheral face and an orifice extending through the thickness of the flange body, at least one guide pin openings in the top surface of the body;
- a guide pin in each of the at least one guide pin openings, each guide pin having an elongate shaft at a top portion;
- a spring positioned around the elongate shaft of each guide pin;
- and
- a movable plate having a top surface and a bottom surface defining a thickness of the movable plate, at least one guide pin openings extending through the thickness of the movable plate, the movable plate positioned so that the at least one guide pins extend through the at least one guide pin openings with the spring between the top surface of the flange body and the bottom surface of the movable plate.
2 more elements
A variable orifice check valve comprising:
- a flange having a body with a top surface and a bottom surface defining a thickness of the flange body, an outer peripheral face and an orifice extending through the thickness of the flange body, two guide pin openings in the top surface of the body, the outer peripheral face of the flange body having a concave surface;
- a guide pin in each of the guide pin openings, each guide pin having an elongate shaft at a top portion;
- a spring positioned around the elongate shaft of each guide pin;
- and
- a movable plate having a top surface and a bottom surface defining a thickness of the movable plate, the guide pin openings extending through the thickness of the movable plate, the movable plate positioned so that the guide pins extend through the guide pin openings with the spring between the top surface of the flange body and the bottom surface of the movable plate.
2 more elements
Dependencies are inferred from the claim text.