Chemical source vessel with dip tube
AssigneeASM IP Holding B.V.
InventorsAndrew Michael Yednak, III, Todd Robert Dunn
Life of this patent
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Abstract
A chemical vessel is disclosed comprising a dip tube and a level sensor tube arranged in an elongated counterbore incorporated into a housing of the chemical vessel. The chemical vessel may be configured to allow a pushback routine to take place, whereby a level of liquid in the chemical vessel is reduced to a point that the dip tube is free from liquid inside the dip tube or at the bottom of the dip tube. Once the dip tube is free of the liquid, then a vacuum source may be used to purge vapor within the chemical vessel without the risk of damage to the vacuum source.
Claims20
A chemical vessel for providing a chemical precursor, comprising:
- a vessel housing;
- a counterbore built into a bottom of the vessel housing;
- a level sensor tube extending from a top of the vessel housing into the counterbore, the level sensor tube comprising a plurality of level sensors indicating a level of chemical precursor within the vessel housing;
- and
- a dip tube extending from the top of the vessel housing to approximately a top of the counterbore,
- wherein a length of the level sensor tube within the vessel housing is greater than a length of the dip tube within the vessel housing.
A chemical vessel for providing a chemical precursor, comprising:
- a vessel housing;
- a counterbore built into a bottom of the vessel housing;
- a level sensor tube extending from a top of the vessel housing into the counterbore;
- and
- a dip tube extending from the top of the vessel housing,
- wherein a length of the level sensor tube within the vessel housing is greater than a length of the dip tube within the vessel housing.
A chemical vessel, comprising:
- a vessel housing;
- a counterbore built into a bottom of the vessel housing;
- a level sensor tube extending from a top of the vessel housing into the counterbore, the level sensor tube comprising at least one level sensor indicating a level of chemical precursor within the vessel housing;
- and
- a dip tube extending from the top of the vessel housing to approximately a top of the counterbore,
- wherein the level sensor tube extends further downward within the vessel housing than the dip tube.
Dependencies are inferred from the claim text.