Plasma-resistant glass and manufacturing method therefor
AssigneesIones Co., Ltd., Korea Institute of Ceramic Engineering and Technology
InventorsDae Gean KIM, Hye Won SEOK, Hyeong Jun KIM
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Abstract
An embodiment of the present invention relates to a plasma-resistant glass, and a manufacturing method therefor, and the present invention is intended to provide a plasma-resistant glass having improved plasma resistance properties, and a manufacturing method therefor. To this end, the present invention provides a plasma-resistant glass including SiO2 in an amount of 40 to 75 mol %, Al2O3 in an amount of 5 to 20 mol %, MgO in an amount of 10 to 40 mol %, and MgF2 in an amount of 0.01 to 10 mol %, and a manufacturing method therefor.
Claims14
A method for manufacturing a plasma-resistant glass, the method comprising:
- mixing SiO2 powder, Al2O3 powder, MgO powder, and MgF2 powder to prepare a plasma-resistant glass raw material;
- melting the plasma-resistant glass raw material;
- slowly cooling the molten product at a temperature higher than a glass transition temperature (Tg);
- furnace-cooling the slowly cooled product to room temperature;
- and
- obtaining a furnace-cooled plasma-resistant glass,
- wherein the obtained plasma-resistant glass comprises SiO2 in an amount of 40 to 75 mol %, Al2O3 in an amount of 5 to 20 mol %, MgO in an amount of 10 to 40 mol %, and MgF2 in an amount of 0.01 to 10 mol %.
A plasma-resistant glass comprising SiO2 in an amount of 40 to 75 mol %, Al2O3 in an amount of 5 to 20 mol %, MgO in an amount of 10 to 40 mol %, and MgF2 in an amount of 0.01 to 10 mol %.
Dependencies are inferred from the claim text.