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US 2023/0406692 A1Published application
Microelectromechanical system (mems) microphone and fabrication method thereof
AssigneeUnited Microelectronics Corp.
InventorsJung-Hao Chang, Weng-Yi Chen
Life of this patent
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Abstract
A microelectromechanical system (MEMS) microphone includes a substrate, a membrane supported relative to the substrate, an opening extending through the entire thickness of the membrane, and a spacer disposed on the sidewall of the opening. The spacer protrudes beyond the top surface of the membrane.
Claims19
A microelectromechanical system (MEMS) microphone, comprising:
- a substrate;
- a membrane supported relative to the substrate, wherein the membrane comprises an inner portion and an outer portion;
- a first spacer disposed on a sidewall of the inner portion directly facing the outer portion;
- a second spacer disposed on a sidewall of the outer portion directly facing the inner portion;
- and
- a slit between the first spacer and the second spacer.
3 more elements
A method of fabricating a microelectromechanical system (MEMS) microphone, comprising:
- providing a substrate;
- forming a membrane supported relative to the substrate, wherein the membrane comprises an inner portion and an outer portion;
- forming a first spacer on a sidewall of the inner portion directly facing the outer portion;
- forming a second spacer on a sidewall of the outer portion directly facing the inner portion;
- and
- forming a slit between the first spacer and the second spacer.
3 more elements
A microelectromechanical system (MEMS) microphone, comprising:
- a substrate;
- a membrane supported relative to the substrate;
- an opening penetrating through an entire thickness of the membrane;
- and
- a spacer disposed on a sidewall of the opening.
2 more elements
A method of fabricating a microelectromechanical system (MEMS) microphone, comprising:
- providing a substrate;
- forming a membrane supported relative to the substrate;
- forming an opening penetrating through an entire thickness of the membrane;
- and
- forming a spacer disposed on a sidewall of the opening.
2 more elements
Dependencies are inferred from the claim text.