Memory device
AssigneeUnited Microelectronics Corp.
InventorsChih-Wei Kuo, Chung-Yi Chiu
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AssigneeUnited Microelectronics Corp.
InventorsChih-Wei Kuo, Chung-Yi Chiu
Estimating the term…
A memory device includes a substrate, a memory unit disposed on the substrate, a first spacer layer, and a second spacer layer. The memory unit includes a first electrode, a second electrode disposed above the first electrode, and a memory material layer disposed between the first electrode and the second electrode. The first spacer layer is disposed on a sidewall of the memory unit and includes a first portion disposed on a sidewall of the first electrode, a second portion disposed on a sidewall of the second electrode, and a bottom portion. A thickness of the second portion is greater than that of the first portion. The second spacer layer is disposed on the first spacer layer. A material composition of the second spacer layer is different from that of the first spacer layer. The bottom portion is disposed between the substrate and the second spacer layer.
A memory device, comprising:
Dependencies are inferred from the claim text.