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US 2023/0403513 A1Published application
Electrostatic transducer and method of manufacturing electrostatic transducer
AssigneeTohoku University
InventorsShuji TANAKA, Yukio SUZUKI
Life of this patent
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Abstract
An electrostatic transducer including a displacement plate having a fixed portion fixed to a support and a fluctuating portion provided so as to freely fluctuate with respect to the fixed portion. At least a portion of a detection means is attached to the fluctuating portion so as to freely fluctuate together with the fluctuating portion, and is provided so as to be able to detect the fluctuation of the fluctuating portion as a change in electrostatic capacitance. The detection means is arranged in a vacuum or low-pressure space.
Claims14
An electrostatic transducer comprising:
- a support;
- a displacement plate having a fixed portion fixed to the support and a fluctuating portion provided to freely fluctuate with respect to the fixed portion;
- and
- a detection means, at least a portion of which is attached so as to freely fluctuate together with the fluctuating portion, and provided so as to be able to detect the fluctuation of the fluctuating portion as a change in electrostatic capacitance, wherein
- the detection means is arranged in a vacuum or low-pressure space.
2 more elements
Dependencies are inferred from the claim text.