Surface-Acoustic-Wave (SAW) Filter with Dielectric Material Disposed in a Piezoelectric Layer
AssigneeRf360 Europe GmbH
InventorsMichael Merker, Stefan Ammann, Marc Esquius Morote, Matthias Pernpeintner
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Abstract
An apparatus is disclosed for implementing a surface-acoustic-wave (SAW) filter with dielectric material disposed in a piezoelectric layer. In an example aspect, the apparatus includes a surface-acoustic-wave filter with a piezoelectric layer, an electrode structure, and dielectric material. The piezoelectric layer has at least one channel. The dielectric material is disposed in the at least one channel of the piezoelectric layer and is at least partially covered by the electrode structure.
Claims30
An apparatus comprising:
- a surface-acoustic-wave filter comprising:
- a piezoelectric layer having at least one channel;
- an electrode structure;
- and
- dielectric material disposed in the at least one channel of the piezoelectric layer, the dielectric material at least partially covered by the electrode structure.
An apparatus comprising:
- a surface-acoustic-wave filter configured to generate a filtered signal from a radio-frequency signal, the surface-acoustic-wave filter comprising:
- means for converting the radio-frequency signal to an acoustic wave and converting a propagated acoustic wave into the filtered signal;
- means for propagating the acoustic wave across a planar surface to produce the propagated acoustic wave;
- and
- means for operating in a piston mode, the means for operating disposed in the means for propagating and at least partially covered by the means for converting.
A method of manufacturing a surface-acoustic-wave filter, the method comprising:
- providing a piezoelectric layer;
- etching at least one channel across a surface of the piezoelectric layer;
- depositing dielectric material within the at least one channel;
- and
- providing an electrode structure that at least partially covers the dielectric material.
An apparatus comprising:
- a piezoelectric layer configured to propagate an acoustic wave along a first axis, the piezoelectric layer having at least one recessed area with a longitudinal axis that is substantially parallel to the first axis;
- and
- dielectric material positioned in the at least one recessed area, the dielectric material having at least one surface exposed.
Dependencies are inferred from the claim text.