Defect inspection apparatus
AssigneeHitachi High-Tech Corporation
InventorsYasuhiro YOSHIDA, Masayoshi Ishikawa, Toshinori Yamauchi, Kosuke Fukuda, Hiroyuki Shindo
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Abstract
A defect inspection apparatus includes: a feature value calculation unit calculating a feature value based on a captured image of a sample; an image information reduction unit generating a latent variable by reducing an information quantity of the feature value; a statistic value estimation unit estimating an image statistic value that can be taken by a normal image based on the latent variable; and a defect detection unit detecting a defect in an inspection image based on the image statistic value and the inspection image of the sample.
Claims10
A defect inspection apparatus comprising:
- a feature value calculation unit calculating a feature value based on a captured image of a sample;
- an image information reduction unit generating a latent variable by reducing an information quantity of the feature value;
- a statistic value estimation unit estimating an image statistic value that can be taken by a normal image based on the latent variable;
- and
- a defect detection unit detecting a defect in an inspection image based on the image statistic value and the inspection image of the sample.
Dependencies are inferred from the claim text.