Vacuum Treatment Apparatus and Vacuum Treatment Method

A vacuum treatment apparatus comprising:

• a first vacuum chamber including a first gate valve to be opened and closed depending on conveyance of a sample to/from outside the apparatus;
• a second vacuum chamber connected to the first vacuum chamber via a second gate valve;
• a vacuum pump that vacuum-evacuates the first vacuum chamber;
• a pressure gauge that measures an internal pressure of the first vacuum chamber;
• and
• a computer system that controls conveyance of the sample through the second gate valve from the first vacuum chamber to the second vacuum chamber, wherein
• the computer system stops the vacuum evacuation, which is being performed by the vacuum pump for a first duration of time, after having controlled the second gate valve to a closed state, measures the internal pressure of the first vacuum chamber by using the pressure gauge in a condition in which the vacuum evacuation is stopped, and controls the second gate valve to an open state if the measured internal pressure reaches a first reference value,
• if the measured internal pressure does not reach the first reference value, the computer system repeats a loop processing of stopping the vacuum evacuation after having been performed by the vacuum pump for a second duration of time and measuring the internal pressure of the first vacuum chamber in a condition in which the vacuum evacuation is stopped, until the measured internal pressure reaches the first reference value.

A vacuum treatment method for a vacuum treatment apparatus including:

• a first vacuum chamber including a first gate valve to be opened and closed depending on conveyance of a sample to/from outside the apparatus;
• a second vacuum chamber connected to the first vacuum chamber via a second gate valve;
• a vacuum pump that vacuum-evacuates the first vacuum chamber;
• and
• a pressure gauge that measures an internal pressure of the first vacuum chamber,
• wherein when the conveyance of the sample from the first vacuum chamber to the second vacuum chamber via the second gate valve is controlled, the vacuum evacuation which is being performed by the vacuum pump for a first duration of time is stopped after having controlled the valve to close, the internal pressure of the first vacuum chamber is measured by using the pressure gauge in a condition in which the vacuum evacuation is stopped, and the second gate valve is controlled to an open state if the measured internal pressure reaches a first reference value, and
• if the measured internal pressure does not reach the first reference value, a loop processing of stopping the vacuum evacuation after having been performed by the vacuum pump for a second duration of time, and measuring the internal pressure of the first vacuum chamber in a condition in which the vacuum evacuation is stopped is repeated until the measured internal pressure reaches the first reference value.

A vacuum treatment apparatus comprising:

• a first vacuum chamber including a first gate valve to be opened and closed depending on conveyance of a sample to/from an apparatus;
• a second vacuum chamber connected to the first vacuum chamber via a second gate valve;
• a vacuum pump that vacuum-evacuates the first vacuum chamber via a vacuum valve;
• and
• a computer system that controls conveyance of the sample from the first vacuum chamber to the second vacuum chamber through the second gate valve, wherein
• the computer system controls to repeat an opening and closing operation of the vacuum valve or adjustment of the degree of opening while the sample stays in the first vacuum chamber and conveys the sample from the first vacuum chamber to the second vacuum chamber based on a result of comparison between a degree of vacuum or internal pressure of the first vacuum chamber within a control period and a predetermined threshold value, or the amount of change or response characteristic of the degree of vacuum or internal pressure of the first vacuum chamber within the control period.