Radiation-sensitive composition and method of forming resist pattern
AssigneeJsr Corporation
InventorKen MARUYAMA
Life of this patent
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Abstract
A radiation-sensitive composition includes: a polymer (A) including a structural unit having a hydroxyl group bonded to an aromatic ring; and an acid-generating compound including a radiation-sensitive onium cation and an organic anion (provided that the polymer (A) is excluded), in which, at least one compound selected from the group consisting of the polymer (A) and the acid-generating compound includes a radiation-sensitive onium cation structure [X] having two or more of at least one substituent β selected from the group consisting of a fluoroalkyl group and a fluoro group (provided that the fluoro group in the fluoroalkyl group is excluded); and an organic anion structure [Y] having an iodo group, in the same compound or different compounds.
Claims12
A radiation-sensitive composition comprising:
- a polymer (A) comprising a structural unit which comprises an aromatic ring and a hydroxyl group bonded to the aromatic ring;
- and
- at least one acid-generating compound each comprising a radiation-sensitive onium cation structure and an organic anion structure provided that the polymer (A) is excluded from the at least one acid-generating compound, wherein
- the radiation-sensitive composition comprises:
- a fluorine-containing radiation-sensitive onium cation structure comprising two or more fluorine-containing groups each of which is a fluoroalkyl group or and a fluoro group, provided that a fluoro group in the fluoroalkyl group is excluded from the fluoro group;
- and
- an iodine-containing organic anion structure comprising an iodo group, provided that
- the fluorine-containing radiation-sensitive onium cation structure and the iodine-containing organic anion structure are included in a same compound included in the radiation-sensitive composition, or separately included in two different compounds included in the radiation-sensitive composition.
Dependencies are inferred from the claim text.