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US 2023/0400720 A1Published application
Analyzing microtextured regions of optically anisotropic materials
AssigneeMRL Materials Resources LLC
InventorsDaniel P. Satko, Ayman A. Salem, Thomas J. Carmody, Patrick M. Fleisher
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Abstract
Images of samples that are illuminated with polarized light are captured. Azimuth and inclination data are extracted from the captured images. The azimuth and inclination data are used to quantify MTRs.
Claims10
A system comprising:
- a light source for emitting substantially monochromatic light;
- a fixed polarizer having a first polarization axis, the linear polarizer for receiving the emitted light and producing a polarized light from the received light;
- a beam splitter for receiving the polarized light and redirecting the received light to a half-wave plate;
- an objective lens for receiving the redirected light from the half-wave plate and focusing the redirected light onto a sample, the sample having an optical anisotropy, the objective lens further for receiving a reflected light from the sample and propagating the reflected light to the half-wave plate and the beam splitter, the reflected light being a function of the optical anisotropy;
- an analyzer having a second polarization axis, the second polarization axis being generally orthogonal to the first polarization axis, the analyzer for receiving the propagated reflected light from the beam splitter and producing a partially extinguished light, the partially extinguished light being a function of the first polarization axis, the second polarization axis, and the optical anisotropy of the sample;
- a camera to capture an image sequence of the partially extinguished light;
- and
- a processing system for:
- flat-field correcting the captured image sequence;
- performing image rotation and image registration;
- extracting an intensity response at each pixel of the captured image;
- extracting an amplitude value for the intensity response at each pixel of the captured image sequence;
- extracting a phase value for the intensity response at each pixel of the captured image sequence;
- correlating the amplitude with an inclination of an optic axis;
- correlating the phase with an azimuth of the optic axis;
- and
- quantifying microstructured regions (MTRs) using the inclination and azimuth.
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