Diffusion plate of micro array type

A microlens array in which lenses are arrayed longitudinally and laterally on an array surface, wherein

• when a longitudinal direction and a lateral direction of an array of the lenses are regarded as a longitudinal direction and a lateral direction of a lens among the lenses, the lens has a cross-cylindrical convex lens surface composed of a combination of a convex surface that is cylindrical along the lateral direction throughout sections that are parallel to the longitudinal direction of the lens and are orthogonal to the array surface and a convex surface that is cylindrical along the longitudinal direction throughout sections that are parallel to the lateral direction of the lens and are orthogonal to the array surface, and
• a sag amount is corrected so as to increase an inclination of a skirt in each of meridians of the sections parallel to the longitudinal direction and meridians of the sections parallel to the lateral direction.

A microlens array in which lenses are arrayed in a lattice on an array surface, wherein

• the lenses each have a cross-cylindrical concave lens surface composed of a combination of a concave surface that is cylindrical throughout sections that are parallel to at least one lattice direction of the lens and are orthogonal to the array surface and a concave surface that is cylindrical throughout sections that are orthogonal to the lattice direction and are orthogonal to the array surface, and
• a sag amount is corrected so as to increase an inclination of a rim in each of meridians of the sections parallel to the lattice direction of the lens and meridians of the sections orthogonal to the lattice direction of the lens.

A microlens array in which lenses are arrayed longitudinally and laterally on an array surface, wherein

• when a longitudinal direction and a lateral direction of an array of the lenses are regarded as a longitudinal direction and a lateral direction of a lens among the lenses, the lens has a cross-cylindrical concave lens surface composed of a combination of a concave surface that is cylindrical along the lateral direction throughout sections that are parallel to the longitudinal direction of the lens and are orthogonal to the array surface and a concave surface that is cylindrical along the longitudinal direction throughout sections that are parallel to the lateral direction of the lens and are orthogonal to the array surface, and
• a sag amount is corrected so as to increase an inclination of a rim in each of meridians of the sections parallel to the longitudinal direction and meridians of the sections parallel to the lateral direction.

A concave micromirror array in which concave mirrors are arrayed in a lattice on an array surface, wherein

• the concave mirrors each have a cross-cylindrical concave surface composed of a combination of a concave surface that is cylindrical throughout sections that are parallel to at least one lattice direction of the concave mirror and are orthogonal to the array surface and a concave surface that is cylindrical throughout sections that are orthogonal to the lattice direction and are orthogonal to the array surface, and
• a sag amount is corrected so as to increase an inclination of a rim in each of meridians of the sections parallel to the lattice direction of the concave mirror and meridians of the sections orthogonal to the lattice direction of the concave mirror.

A concave micromirror array in which concave mirrors are arrayed longitudinally and laterally on an array surface, wherein

• when a longitudinal direction and a lateral direction of the concave mirrors are regarded as a longitudinal direction and a lateral direction of a concave mirror among the concave mirrors, the concave mirror has a cross-cylindrical concave surface composed of a combination of a concave surface that is cylindrical along the lateral direction throughout sections that are parallel to the longitudinal direction of the concave mirror and are orthogonal to the array surface and a concave surface that is cylindrical along the longitudinal direction throughout sections that are parallel to the lateral direction of the concave mirror and are orthogonal to the array surface, and
• a sag amount is corrected so as to increase an inclination of a rim in each of meridians of the sections parallel to the longitudinal direction and meridians of the sections parallel to the lateral direction.

A convex micromirror array in which convex mirrors are arrayed in a lattice on an array surface, wherein

• the convex mirrors each have a cross-cylindrical convex surface composed of a combination of a convex surface that is cylindrical throughout sections that are parallel to at least one lattice direction of the convex mirror and are orthogonal to the array surface and a convex surface that is cylindrical throughout sections that are orthogonal to the lattice direction and are orthogonal to the array surface, and
• a sag amount is corrected so as to increase an inclination of a skirt in each of meridians of the sections parallel to the lattice direction of the convex mirror and meridians of the sections orthogonal to the lattice direction of the convex mirror.

A convex micromirror array in which convex mirrors are arrayed longitudinally and laterally on an array surface, wherein

• when a longitudinal direction and a lateral direction of the convex mirrors are regarded as a longitudinal direction and a lateral direction of a convex mirror among the convex mirrors, the convex mirror has a cross-cylindrical convex surface composed of a combination of a convex surface that is cylindrical along the lateral direction throughout sections that are parallel to the longitudinal direction of the convex mirror and are orthogonal to the array surface and a convex surface that is cylindrical along the longitudinal direction throughout sections that are parallel to the lateral direction of the convex mirror and are orthogonal to the array surface, and
• a sag amount is corrected so as to increase an inclination of a skirt in each of meridians of the sections parallel to the longitudinal direction and meridians of the sections parallel to the lateral direction.