Soft magnetic film iron core and preparation method therefor and sensor

Abstract

A soft magnetic film iron core is provided, including an insulating substrate and a soft magnet. Multiple layers of hollowing-out grid networks stacked vertically are arranged in the soft magnet, and all grid cavities in the hollowing-out grid networks are filled with insulators, such that the micro-morphology of the film iron core is changed, and the film iron core presents a structure of multilayer staggered grid networks as a whole. The soft magnetic film iron core can be processed by the micro-electro-mechanical system (MEMS) process. The proposed preparation method for the soft magnetic film iron core adopts low-cost standard MEMS processes such as ultraviolet (UV) lithography, electroplating, and wet etching, which can realize standardized mass production of the iron core and reduce the processing cost. A sensor using the soft magnetic film iron core as a sensitive element is provided.

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