Substrate processing system tools for monitoring, assessing and responding based on health including sensor mapping and triggered datalogging

A health monitoring, assessing and response system comprising:

• an interface configured to receive data from N sensors disposed in a substrate processing system, where N is greater than or equal to two;
• and
• a controller comprising a health index module, wherein
• the health index module is configured to
• receive sets of data output respectively from the N sensors,
• assess the sets of received data to determine a plurality of health index values, and
• aggregate the plurality of health index values to determine a system health index value, and
• the controller is configured to perform a countermeasure in response to at least one of the system health index value decreasing, reaching a predetermined level or being within a predetermined range.

A sensor mapping system comprising:

• N sensors configured to detect respective parameters of a substrate processing system, where N is greater than or equal to two;
• an interface configured to receive data from the N sensors;
• and
• a controller comprising a sensor mapping module, wherein the sensor mapping module is configured to
• receive instructions to display sensor information for the N sensors,
• receive data output respectively from the N sensors, and
• display locations of the N sensors along with the sensor information over a view of at least a portion of the substrate processing system.

A datalogging system comprising:

• N sensors configured to detect respective parameters of a substrate processing system, where N is greater than or equal to two;
• an interface configured to receive data from the N sensors;
• and
• a controller comprising a datalogging module, wherein the datalogging module is configured to
• receive instructions to select one or more of the N sensors and trigger information,
• monitor at least one of the N sensors and detect one or more trigger events identified by the trigger information, and
• data log outputs of the selected one or more of the N sensors in response to detecting the one or more trigger events to provide logged data,
• wherein the controller is configured to analyze the logged data and based on result of analyzing the logged data, performing a countermeasure.