Probe device, probe system including the probe device and operating method thereof
AssigneeStar Technologies Inc.
InventorsCHOON LEONG LOU, HO-YEH CHEN, HSIAO-HUI HSIEH, DAI-CHUN CHEN
Life of this patent
Estimating the term…
Abstract
The present disclosure provides a probe device, a probe system including the probe device and an operating thereof. The operating method includes: approaching the probe device to a reference region; stopping the probe device when a first pin of a sensing module of the probe device touches the reference region; rotating the probe device and approaching the probe device to the reference region; and stopping the probe device when both the first pin and a second pin of the sensing module of the probe device touch the reference region.
Claims13
A method for operating a probe device, comprising:
- approaching the probe device to a reference region;
- stopping the probe device when a first pin of a sensing module of the probe device touches the reference region;
- rotating the probe device about a first axis and approaching the probe device to the reference region;
- stopping the probe device when both the first pin and a second pin of the sensing module of the probe device touch the reference region;
- rotating the probe device about a second axis and approaching the probe device to the reference region;
- and
- stopping the probe device when the first pin, the second pin and a third pin of the sensing module of the probe device touch the reference region.
A probe device, comprising:
- a body;
- an optical probe disposed on the body;
- and
- a sensing module disposed on the body, comprising at least a first pin, a second pin, and a third pin to adjust two relative orientations between the optical probe and a reference region,
- wherein the first pin and the second pin are configured to adjust a first relative orientation of the two relative orientations,
- wherein the second pin and the third pin are configured to adjust a second relative orientation of the two relative orientations.
A probe system, comprising:
- a frame;
- a probe device, assembled with the frame and comprising:
- a body;
- and
- an optical probe disposed on the body;
- and
- a sensing module disposed on the body or the frame, comprising at least a first pin, a second pin, and a third pin to adjust two relative orientations between the optical probe and a reference region,
- wherein the first pin and the second pin are configured to adjust a first relative orientation of the two relative orientations,
- wherein the second pin and the third pin are configured to adjust a second relative orientation of the two relative orientations.
Dependencies are inferred from the claim text.