Sensor for detecting conductive particles
AssigneeHeraeus Nexensos GmbH
InventorsTim ASMUS, Christoph NICK, Karlheinz WIENAND, Peter PITZIUS, Christian LAMMARCK, Laura LEISTENSCHLÄGER, Tobias REISING
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AssigneeHeraeus Nexensos GmbH
InventorsTim ASMUS, Christoph NICK, Karlheinz WIENAND, Peter PITZIUS, Christian LAMMARCK, Laura LEISTENSCHLÄGER, Tobias REISING
Estimating the term…
A sensor for detecting conductive particles in a gas flow, comprising a substrate having two front sides, wherein a gas flow direction is from a first front side to a second front side, wherein a resistive electrode structure comprising at least two electrodes is formed on the substrate, the at least two electrodes are electrically separated, wherein in relation to the gas flow direction, a first electrode is arranged in a first section of the sensor such that the first electrode acts as a suction electrode, wherein a sensor detection region is formed in a second section of the sensor, whereby the sensor detection region is formed by portions of the first electrode and a second electrode, wherein the second electrode is formed at least partially in a third section of the sensor.
A sensor for detecting conductive, in particular charged, particles in a gas flow, comprising a substrate having a cuboid or cylindrical shape having two front sides, wherein a gas flow direction is defined as extending in direction from a first front side to a second front side, wherein a resistive electrode structure comprising at least two electrodes is formed at least on one surface of the substrate, the at least two electrodes are electrically separated from one another, wherein in relation to the gas flow direction, a first electrode is arranged in a first section of the sensor and is designed in such a way that the first electrode acts as a suction electrode, wherein a sensor detection region is formed in a second section of the sensor, whereby the sensor detection region is formed by a portion of the first electrode and a portion of a second electrode, which is spaced apart from the portion of the first electrode, wherein the second electrode is formed at least partially in a third section of the sensor.
Dependencies are inferred from the claim text.