US 2023/0400294 A1Published application

Thickness measurement device

AssigneeLG Electronics Inc.

InventorsSeohyeon JO, Daecheol LIM

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Abstract

A thickness measurement device can include a stage module, an upper optical module above the stage module and spaced from the stage module in a Z-axis direction, a lower optical module below the stage module and spaced from the stage module in the Z-axis direction. The stage module has a larger area than the upper optical module and the lower optical module, a Y-axis movement mechanism for moving the stage along a Y-axis direction, a measurement specimen placement part which is disposed on the stage and on which a measurement specimen is placed, a specimen mounting part on which one of a reference specimen or a correction specimen is selectively mounted, and a specimen mounting part movement mechanism that is disposed on the stage and moves the specimen mounting part along the Z-axis direction.

Claims20

Dependent claims

A thickness measurement device comprising;

a stage module;
an upper optical module that is disposed above the stage module and is spaced apart from the stage module in a Z-axis direction;
and
a lower optical module that is disposed below the stage module and is spaced apart from the stage module in the Z-axis direction,
wherein the stage module comprises:
a stage having an area greater than each of an area of the upper optical module and an area of the lower optical module;
a Y-axis movement mechanism configured to move the stage along a Y-axis direction;
a measurement specimen placement portion which is disposed on the stage and on which a measurement specimen is seated;
a specimen mounting portion on which one of a reference specimen and a correction specimen is selectively mounted;
and
a specimen mounting portion movement mechanism disposed on the stage to move the specimen mounting portion along the Z-axis direction, and
wherein the reference specimen is a specimen serving as a reference for a thickness measurement, and the correction specimen is a specimen having at least one marker portion thereon.

9 more elements

A thickness measurement device comprising:

a stage to support a measurement specimen;
an upper optical module above the stage;
a lower optical module below the stage;
a measurement specimen placement portion on the stage to seat the measurement specimen;
a specimen mounting portion to selectively mount one of a reference specimen and a correction specimen;
and
a specimen mounting portion movement mechanism on the stage to move the specimen mounting portion,
wherein the reference specimen serves as a reference for a thickness measurement for the measurement specimen, and the correction specimen includes at least one marker portion thereon. and
wherein a thickness of the measurement specimen is determined by:
seating the measurement specimen on the measurement specimen placement portion,
measuring a first height value from a virtual plane to a top surface of the measurement specimen using the upper optical module and a second height value from the virtual plane to a bottom surface of the measurement specimen using the lower optical module measuring, and
calculating the thickness of the measurement specimen by adding the first height value and the second height value.

9 more elements

Dependencies are inferred from the claim text.

Facts

Application: 18/034,831Filed 18 May 2022
Priority: KR 10-2021-006441418 May 2021
Published: 14 Dec 2023
Term ends: Not estimatedThe source records don’t support an estimate.

Classification10 codes

G01B 11/0608
For measuring thickness ; e.g. of sheet material: height gauges
G01B 5/0002
Measuring arrangements characterised by the use of mechanical techniques: arrangements for supporting, fixing or guiding the measuring instrument…
G01B 11/06
For measuring length, width or thickness: for measuring thickness ; e.g. of sheet material
G01B 11/2504
By projecting a pattern, e.g. one or more lines, moiré fringes on the object: calibration devices