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US 2023/0400097 A1Published application
Piston assembly, air cylinder and apparatus for processing substrate
AssigneeSemes Co., Ltd.
InventorsSung Hun EOM, Nam Ki HONG
Life of this patent
Estimating the term…
Abstract
The present disclosure is to provide a piston assembly in which a particle does not leak out of a cylinder, and including, in an embodiment, a piston body; a piston rod connected to the piston body; a first groove formed in an outer surface of the piston body; and a particle discharge flow path extending from an internal space of the piston body to the outer surface of the piston body.
Claims20
A piston assembly comprising:
- a piston body;
- a piston rod connected to the piston body;
- a first groove formed in an outer surface of the piston body;
- a particle discharge flow path extending from an internal space of the piston body to the outer surface of the piston body;
- a second groove formed in the outer surface of the piston body to be spaced apart from the first groove in a moving direction of the piston body;
- and
- a first connection flow path connecting an inner side surface of the second groove and a side surface of the piston body in the moving direction, wherein the first connection flow path is connected to a surface of the piston body onto which the piston rod is connected.
4 more elements
(canceled)
A piston assembly comprising:
- a piston body;
- a piston rod connected to the piston body;
- a first groove formed in an outer surface of the piston body;
- a particle discharge flow path extending from an internal space of the piston body to the outer surface of the piston body;
- a second groove formed in the outer surface of the piston body to be spaced apart from the first groove in a moving direction of the piston body;
- a third groove formed in the outer surface of the piston body to be spaced apart from the second groove, based on the first groove as a center, in an opposite directions;
- and
- connection flow path connecting an inner side surface of the third groove and the other side surface of the piston body in the moving direction.
5 more elements
(canceled)
An air cylinder comprising:
- a cylinder body;
- a gas inlet/outlet port connected to the cylinder body;
- and
- a piston assembly disposed in the cylinder body,
- wherein the piston assembly includes a piston body;
- a piston rod connected to the piston body;
- a first groove formed in an outer surface of the piston body;
- a sealing ring disposed in the first groove;
- a second groove formed in the outer surface of the piston body to be spaced apart from the first groove in a moving direction of the piston body;
- a solid lubricant having a ring shape and disposed in the second groove;
- and a particle discharge flow path extending from an internal space of the piston body to a portion of the outer surface of the piston body adjacent to the first groove,
- wherein the particle discharge flow path extends from the piston body to an internal space of the piston rod, and
- wherein the solid lubricant has a ring shape, and is divided into a plurality of portions in a circumferential direction.
10 more elements
(canceled)
Dependencies are inferred from the claim text.