Turbomolecular vacuum pump and method for manufacturing a rotor
AssigneePfeiffer Vacuum GmbH
InventorsPierre-Emmanuel CAVAREC, Romain CRIADO, François ROGER, Eric DULAC
Life of this patent
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Abstract
A turbomolecular vacuum pump drives gases to be pumped from a suction orifice to a discharge orifice. In the turbomolecular vacuum pump, the surface of the internal bowl of the rotor arranged facing the shell of the stator capable of being cooled exhibits a higher emissivity than the outer surface of the rotor in fluidic communication with the pumped gases and/or the surface of the shell of the stator capable of being cooled arranged facing the internal bowl of the rotor exhibits a higher emissivity than the outer surface of the rotor in fluidic communication with the pumped gases.
Claims20
1-16. (canceled)
A turbomolecular vacuum pump configured to drive gases to be pumped from a suction orifice to a discharge orifice, the turbomolecular vacuum pump comprising:
- a stator comprising:
- at least one stage of fins, and
- a shell configured to be cooled;
- a rotor configured to revolve in the stator and comprising:
- at least two blade stages, the blade stages and the fin stages following one another axially along an axis of rotation of the rotor, and
- an internal bowl coaxial to the axis of rotation, arranged facing the shell of the stator;
- a purging device configured to inject a flow of purging gas into a gap situated between the shell of the stator and the internal bowl of the rotor,
- wherein at least one of:
- a surface of the internal bowl of the rotor arranged facing the shell of the stator exhibits a higher emissivity than an outer surface of the rotor in fluidic communication with the pumped gases, at least over a portion of the surface of the internal bowl, and the outer surface of the rotor in fluidic communication with the pumped gas exhibits a lower emissivity than the surface of the internal bowl of the rotor, at least over a portion of the surface of the internal bowl, and
- the surface of the shell of the stator arranged facing the internal bowl of the rotor exhibits a higher emissivity than the outer surface of the rotor in fluidic communication with the pumped gases, at least over a portion of the surface of the shell of the stator, and the outer surface of the rotor in fluidic communication with the pumped gases exhibits a lower emissivity than the surface of the shell of the stator, at least over a portion of the surface of the shell of the stator.
Dependencies are inferred from the claim text.