Mems device with improved dynamic mechanical performance through damping by localized viscoelastic medium
AssigneeMirrorcle Technologies, Inc.
InventorsStefan Richter, Johannes Kindt, Veljko Milanovic
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Abstract
MEMS devices include a suspended element connected to a fixed part of a substrate by one or more flexures, wherein the one or more flexures are configured to permit movement of the suspended element relative to a fixed part of the substrate. A sensor coupled to the suspended element and a damping structure coupled to the suspended element extends into a gap between the suspended element and the fixed part of the substrate. One or more fluid confinement structures are configured to permit movement of the damping structure within a limited portion of the gap and to confine a viscoelastic fluid to the limited portion of the gap.
Claims33
A MEMS device, comprising:
- a substrate;
- a suspended element connected to a fixed part of the substrate by one or more flexures,
- wherein the one or more flexures are configured to permit movement of the suspended element relative to a fixed part of the substrate;
- a sensor coupled to the suspended element;
- a damping structure coupled to the suspended element extending into a gap between the suspended element and the fixed part of the substrate;
- and
- one or more fluid confinement structures configured to permit movement of the damping structure within a limited portion of the gap and to confine a viscoelastic fluid to the limited portion of the gap.
Dependencies are inferred from the claim text.