Capacitive Linearization Method Applied to MEMS Microphones Systems

An integrated circuit comprising:

• a first bias resistor coupled between an input pin and at least one reference voltage;
• a nonlinear capacitance component comprising a capacitor-connected transistor, wherein the nonlinear capacitance component is coupled to the input pin, an internal node, and at least one reference voltage node;
• and
• a source follower coupled to the internal node.

A method comprising:

• in a digital microphone comprising a MEMS device and a programmable amplifier or source follower,
• determining a first nonlinear equivalent capacitance of the MEMS device and the programmable amplifier or source follower, the first nonlinear equivalent capacitance having a first capacitance-to-voltage (CV) profile;
• and
• compensating the first nonlinear equivalent capacitance with a nonlinear capacitance component, wherein the nonlinear capacitance component comprises a second nonlinear equivalent capacitance having a second CV profile.