Detection method of resistivity and processing method of plate-shaped workpiece
AssigneeDisco Corporation
InventorAtsushi UEKI
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Abstract
A detection method of resistivity is a detection method of resistivity in which resistivity of a plate-shaped workpiece having a back surface and a front surface on a side opposite to the back surface is detected. The detection method includes an interference waveform acquisition step of irradiating the back surface of the plate-shaped workpiece with light from a light source and acquiring an interference waveform between light reflected by the back surface and light that has been transmitted through the back surface and been reflected by the front surface, and an estimation step of estimating the resistivity of the plate-shaped workpiece on the basis of the interference waveform acquired in the interference waveform acquisition step.
Claims7
A detection method of resistivity in which resistivity of a plate-shaped workpiece having a first surface and a second surface on a side opposite to the first surface is detected, the detection method comprising:
- an interference waveform acquisition step of irradiating the first surface of the plate-shaped workpiece with light from a light source and acquiring an interference waveform between light reflected by the first surface and light that has been transmitted through the first surface and been reflected by the second surface;
- and
- an estimation step of estimating the resistivity of the plate-shaped workpiece on a basis of the interference waveform acquired in the interference waveform acquisition step.
A processing method of a plate-shaped workpiece in which a plate-shaped workpiece having a first surface and a second surface on a side opposite to the first surface is processed, the processing method comprising:
- a resistivity detection step of detecting resistivity of the plate-shaped workpiece;
- a processing condition selection step of selecting a processing condition corresponding to the resistivity;
- and
- a laser beam irradiation step of irradiating the plate-shaped workpiece with a laser beam to execute processing under the processing condition selected in the processing condition selection step, wherein
- the resistivity detection step includes
- an interference waveform acquisition step of irradiating the first surface of the plate-shaped workpiece with light from a light source and acquiring an interference waveform between light reflected by the first surface and light that has been transmitted through the first surface and been reflected by the second surface, and
- an estimation step of estimating the resistivity of the plate-shaped workpiece on a basis of the interference waveform acquired in the interference waveform acquisition step.
Dependencies are inferred from the claim text.