Parallel-type coating apparatus and method for coating multilayer film

A parallel-type coating apparatus suitable for coating at least one object to be coated carried by a carrier, comprising:

• a double-layer vacuum chamber including a feed chamber and a discharge chamber opposite to each other in a Z-direction, said feed chamber being configured for feeding the carrier, said discharge chamber being configured for discharging the carrier;
• a plurality of process chambers for performing at least a fixed point coating on the at least one object to be coated, two of said process chambers being immediately adjacent to said double-layer vacuum chamber, said double-layer vacuum chamber and said process chambers being arranged in two juxtaposed rows in a Y-direction transverse to the Z-direction;
• a feed lifting mechanism disposed in one of said double-layer vacuum chamber 3 and said process chambers, and including a feed lifting seat for carrying the carrier, said feed lifting seat being movable in the Z-direction, and including a first transfer device for conveying the carrier to move in an X-direction transverse to the Y-direction and the Z-direction, and a second transfer device for conveying the carrier to move in the Y-direction;
• and
• a plurality of first conveying devices respectively disposed in the other ones of said process chambers for conveying the carrier to move in the X-direction or Y-direction.