In situ mechanical characterization of a sample strain

Abstract

A method of measuring a stress-strain curve in a sample, the method including: providing a structure including a first movable island supported by a first beam, a second movable island supported by a second beam, and a gap therebetween connected by a sample, the sample including an initial length; moving the second movable island with a defined displacement; determining a displacement of the first movable island based on moving the second movable island; calculating a difference between the displacement of the first movable island and the defined displacement of the second movable island based on moving the second movable island; determining an applied strain in the sample based on the difference divided by the initial length of the sample; calculating a force on the sample based on the displacement of the first movable island; calculating a stress on the sample based on the force; and determining the stress-strain curve of the sample by plotting the calculated stress against the applied strain.

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