Imprint device, imprint method, article manufacturing method, and storage medium

An article manufacturing method comprising:

• bringing a mold on which a pattern is formed in contact with an imprint material on a substrate and performing imprinting by transferring the pattern to the substrate at a target position on the substrate;
• aligning the mold with the substrate such that the mold and the substrate are at an alignment position corrected based on an amount of relative positional deviation between a pattern mark formed near the pattern of the mold and an alignment mark of the mold obtained by measuring the pattern mark and the alignment mark;
• curing the imprint material at the position at which alignment is performed in the aligning;
• and
• forming the pattern on the substrate in the imprinting and then processing the substrate on which the pattern is formed.

A non-transitory computer-readable storage medium storing a computer program including instructions for executing following processes of:

• bringing a mold on which a pattern is formed in contact with an imprint material on a substrate and performing imprinting by transferring the pattern to the substrate at a target position on the substrate;
• aligning the mold with the substrate such that the mold and the substrate are at an alignment position corrected based on an amount of relative positional deviation between a pattern mark formed near the pattern of the mold and an alignment mark of the mold obtained by measuring the pattern mark and the alignment mark;
• and
• curing the imprint material at the position at which alignment is performed in the aligning.