Coating apparatus and coating method
AssigneesKabushiki Kaisha Toshiba, Toshiba Energy Systems & Solutions Corporation
InventorsNaomi SHIDA, Katsuyuki NAITO, Yutaka SAITA
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Abstract
According to one embodiment of the invention, a coating apparatus includes a coating bar, a plurality of nozzles, a plurality of holding portions, and a detector. The coating bar is configured to face a coating target member. The plurality of nozzles are configured to supply a liquid toward the coating bar. One of the plurality of holding portions holds one of the plurality of nozzles. The one of the plurality of holding portions is configured to control a position of the one of the plurality of nozzles relative to the coating bar. The detector is configured to detect a quantity corresponding to respective positions of the plurality of nozzles with respect to the coating bar.
Claims20
A coating apparatus, comprising:
- a coating bar configured to face a coating target member;
- a plurality of nozzles configured to supply a liquid toward the coating bar;
- a plurality of holding portions, one of the plurality of holding portions holding one of the plurality of nozzles, the one of the plurality of holding portions being configured to control a position of the one of the plurality of nozzles relative to the coating bar;
- and
- a detector configured to detect a quantity corresponding to respective positions of the plurality of nozzles with respect to the coating bar.
A coating method, comprising:
- detecting a quantity corresponding to each position of a plurality of nozzles with reference to a coating bar configured to face a coating target member;
- and
- coating a liquid to the coating target member by supplying the liquid from the plurality of nozzles to the coating bar by controlling a plurality of holders respectively holding the plurality of nozzles based on the quantity, and controlling a position of each of the plurality of nozzles with respect to the coating bar.
Dependencies are inferred from the claim text.