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US 2023/0390680 A1Published application
Filtration in a vapor delivery system
AssigneeEntegris, Inc.
InventorsScott L. Battle, Jacob Thomas
Life of this patent
Estimating the term…
Abstract
A filter assembly includes a fluid inlet; a fluid outlet; a conduit; and a filter. The conduit is fluidly connected to the fluid inlet and the filter. The filter is fluidly connected to the conduit and the fluid outlet. The filter assembly is configured for flowing at least one of the following fluids: MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof. The filter is configured to collect a molybdenum residue, a tungsten residue, or any combination thereof from the fluid resulting in the filtered fluid.
Claims20
A filter assembly, comprising:
- a fluid inlet;
- a fluid outlet;
- a conduit;
- and
- a filter,
- wherein the conduit is fluidly connected to the fluid inlet and the filter,
- wherein the filter is fluidly connected to the conduit and the fluid outlet,
- wherein the filter assembly is configured for flowing at least one of the following fluids:
- MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof;
- wherein the filter is configured to collect a molybdenum residue, a tungsten residue, or any combination thereof from the fluid resulting in the filtered fluid.
7 more elements
A system, comprising:
- a manifold comprising a fluid inlet and a fluid outlet;
- wherein the fluid inlet configured to receive a vapor;
- wherein the fluid outlet configured to output the vapor;
- a conduit fluidly connected to the fluid inlet and configured to receive the vapor;
- and
- a filter fluidly connected to the conduit at a filter inlet and configured to receive the vapor from the conduit, the filter fluidly connected to the fluid outlet at a filter outlet and configured to output a filtered vapor to the fluid outlet;
- wherein the filter is configured to remove at least a portion of a molybdenum residue, a tungsten residue, or any combination thereof in the vapor resulting in the filtered vapor;
- wherein the vapor comprises at least one of MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof.
5 more elements
A method, comprising:
- obtaining a system configured to filter a vapor, wherein the system comprises:
- a member comprising a fluid inlet and a fluid outlet;
- wherein the fluid inlet configured to receive a vapor;
- wherein the fluid outlet configured to output the vapor;
- a conduit fluidly connected to the fluid inlet and configured to receive the vapor;
- and
- a filter fluidly connected to the conduit at a filter inlet and configured to receive the vapor from the conduit, the filter fluidly connected to the fluid outlet at a filter outlet and configured to output a filtered vapor to the fluid outlet;
- wherein the filter is configured to remove at least a portion of a molybdenum residue, a tungsten residue, or any combination thereof in the filtered vapor;
- wherein the vapor comprises at least one of MoO2Cl2, MoOCl4, MoCl5, WCl6, WCl5, WOCl4, WO2Cl2, or any combination thereof;
- and
- installing the system to a vapor delivery system, wherein the system is installed into a delivery manifold of the vapor delivery system.
8 more elements
Dependencies are inferred from the claim text.