Radiation-sensitive resin composition, method of forming pattern, polymer, and compound

A polymer comprising a structural unit represented by formula (2) or formula (3):

• wherein, in the formula (2):
• R1 is a hydrogen atom, a fluorine atom, a methyl group, or a trifluoromethyl group;
• L1 represents a single bond or —COO-L-;
• L represents a substituted or unsubstituted alkanediyl group;
• R2 represents a monovalent hydrocarbon group having 1 to 20 carbon atoms;
• L2 represents a single bond or a divalent linking group;
• m is 0 or 1;
• p is an integer of 1 to (5+2m);
• when p is 1, R3 is a halogen atom or a halogenated hydrocarbon group, and
• when p is an integer of 2 to (2+2m), each R3 is independently a halogen atom, a halogenated hydrocarbon group, a hydroxy group, a monovalent hydrocarbon group having 1 to 10 carbon atoms, or a monovalent alkyl ether group having 1 to 10 carbon atoms, a plurality of R3's are same or different from each other, and at least one R3 is a halogen atom or a halogenated hydrocarbon group,
• wherein, in the formula (3):
• R1 is a hydrogen atom, a fluorine atom, a methyl group, or a trifluoromethyl group;
• L1 represents a single bond or —COO-L-;
• L represents a substituted or unsubstituted alkanediyl group;
• R2 represents a monovalent hydrocarbon group having 1 to 20 carbon atoms;
• L2 represents a single bond or a divalent linking group;
• X represents an oxygen atom, —NH—, or a sulfur atom;
• o is an integer of 1 to 3;
• when o is 1, R3 is a halogen atom or a halogenated hydrocarbon group;
• and
• when o is 2 or 3, each R3 is independently a halogen atom, a halogenated hydrocarbon group, a hydroxy group, a monovalent hydrocarbon group having 1 to 10 carbon atoms, or a monovalent alkyl ether group having 1 to 10 carbon atoms;
• at least one R3 is a halogen atom or a halogenated hydrocarbon group, a plurality of R3's are same or different from each other, and at least one R3 is a halogen atom or a halogenated hydrocarbon group.

A compound represented by formula (5) or formula (6):

• wherein, in the formula (5):
• R1 is a hydrogen atom, a fluorine atom, a methyl group, or a trifluoromethyl group;
• L1 represents a single bond or —COO-L-;
• L represents a substituted or unsubstituted alkanediyl group;
• R2 represents a monovalent hydrocarbon group having 1 to 20 carbon atoms;
• L2 represents a single bond or a divalent linking group;
• m is 0 or 1;
• p is an integer of 1 to (5+2m);
• when p is 1, R3 is a halogen atom, a halogenated hydrocarbon group;
• and
• when p is an integer of 2 to (5+2m), each R3 is independently a halogen atom, a halogenated hydrocarbon group, a hydroxy group, a monovalent hydrocarbon group having 1 to 10 carbon atoms, or a monovalent alkyl ether group having 1 to 10 carbon atoms, a plurality of R3's are same or different from each other, and at least one R3 is a halogen atom or a halogenated hydrocarbon group,
• wherein, in the formula (6):
• R1 is a hydrogen atom, a fluorine atom, a methyl group, or a trifluoromethyl group;
• L1 represents a single bond or —COO-L-;
• L represents a substituted or unsubstituted alkanediyl group;
• R2 represents a monovalent hydrocarbon group having 1 to 20 carbon atoms;
• L2 represents a single bond or a divalent linking group;
• X represents an oxygen atom, —NH—, or a sulfur atom;
• o is an integer of 1 to 3;
• when o is 1, R3 is a halogen atom or a halogenated hydrocarbon group;
• and
• when o is 2 or 3, each R3 is independently a halogen atom, a halogenated hydrocarbon group, a hydroxy group, a monovalent hydrocarbon group having 1 to 10 carbon atoms, or a monovalent alkyl ether group having 1 to 10 carbon atoms, a plurality of R3's are same or different from each other, and at least one R3 is a halogen atom or a halogenated hydrocarbon group.