On-line analysis system and method for specialty gasses

A method, comprising:

• moving a fluid from within a gas container within a gas cabinet along a fluid analysis pathway to an end of the fluid analysis pathway at a switch box of an on-line analysis system;
• moving the fluid through the switch box to an on-line analysis tool of the on-line analysis system by opening the switch box at the end of the fluid analysis pathway allowing the fluid to pass through the switch box to the on-line analysis tool;
• performing one or more types of tests on the fluid with one or more sensors of the on-line analysis tool of the on-line analysis system;
• generating one or more data signals based on results of the one or more types of tests on the fluid;
• receiving the one or more data signals at an on-line data system in electrical communication with the on-line analysis system;
• and
• processing a workpiece when the data signals satisfy a pre-determined value.

A specialty on-line analysis system, comprising:

• a purge fluid source containing a purge fluid;
• a switch box including:
• a plurality of fluid pathways;
• a plurality of first valves, each one of the plurality of first valves in fluid communication with one of the plurality of fluid pathways, each one of the plurality of first valves having a closed position and an opened position, and, during operation, one of the plurality of first valves is opened to allow a fluid from one of the plurality of fluid pathways to pass through the switch box;
• and
• a plurality of second valves, each one of the plurality of second valves in fluid communication with one of the plurality of fluid pathways and in fluid communication with the purge fluid source, each one of the plurality of second valves having a closed position and an opened position, and, during operation, one of the plurality of second valves is opened to allow the purge fluid to pass through the switch box and into one of the plurality of fluid pathways;
• an on-line analysis tool in fluid communication with the plurality of first valves;
• an off-line sampler tool in fluid communication with the plurality of first valves;
• a calibration fluid source containing a calibration fluid in fluid communication with the on-line analysis tool;
• and
• an exhaust port in fluid communication with the on-line analysis tool.