Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, pattern forming method, method for manufacturing electronic device, compound, and resin
AssigneeFUJIFILM Corporation
InventorsTsutomu YOSHIMURA, Masafumi KOJIMA, Akiyoshi GOTO, Yuma KURUMISAWA
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Abstract
The present invention provides an actinic ray-sensitive or radiation-sensitive resin composition containing: (A) a resin which has a repeating unit derived from a compound represented by Formula (1) as defined herein; and (B) a compound which generates an acid by irradiation with an actinic ray or a radiation. The present invention also provides an actinic ray-sensitive or radiation-sensitive film, a pattern forming method, a method for manufacturing an electronic device, a compound and a resin.
Claims18
An actinic ray-sensitive or radiation-sensitive resin composition comprising:
- (A) a resin which has a repeating unit derived from a compound represented by the following Formula (1);
- and
- (B) a compound which generates an acid by irradiation with an actinic ray or a radiation,
- wherein in the Formula (1),
- A represents a polymerizable group,
- L represents a divalent linking group having a halogen atom,
- R3 represents a halogen atom, an amino group, a thiol group, or an organic group,
- R4 represents a hydrogen atom or an organic group,
- n represents an integer of 1 or more, m represents an integer of 0 or more, and p represents an integer of 0 or more, n, m, and p satisfy a relationship of n+m≤5+2p, and
- in a case where m represents an integer of 2 or more, a plurality of R3's may be the same or different from each other, and in a case where n represents an integer of 2 or more, a plurality of R4's may be the same or different from each other.
A compound represented by the following Formula (2),
- wherein in the Formula (2),
- A represents a polymerizable group,
- L1 represents a single bond or a divalent organic group,
- R1 represents a halogen atom or an organic group having a halogen atom,
- R2 represents a hydrogen atom, a halogen atom, a hydroxy group, an amino group, a thiol group, or an organic group,
- R3 represents a halogen atom, an amino group, a thiol group, or an organic group,
- R4 represents a hydrogen atom or an organic group,
- n represents an integer of 1 or more, m represents an integer of 0 or more, and p represents an integer of 0 or more, n, m, and p satisfy a relationship of n+m≤5+2p, and
- in a case where m represents an integer of 2 or more, a plurality of R3's may be the same or different from each other, and in a case where n represents an integer of 2 or more, a plurality of R4's may be the same or different from each other.
Dependencies are inferred from the claim text.