Apparatus, method and recording medium for inspecting coating state of object coated on substrate
AssigneeKoh Young Technology Inc.
InventorsByung Sun OH, Hyeon Geun PARK
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Abstract
An apparatus includes one or more light source groups, a camera; one or more memories configured to store one or more first images acquired in advance, and one or more processors communicatively connected to the one or more light source groups, the camera, and the one or more memories, wherein the one or more processors are configured to acquire a second image by controlling a first light source group among the one or more light source groups and the camera and irradiating light beams to a substrate on which an object is coated, and determine a coating state of the object based on the one or more first images and the second image.
Claims19
An apparatus, comprising:
- one or more light source groups;
- a camera;
- one or more memories configured to store one or more first images acquired in advance;
- and
- one or more processors communicatively connected to the one or more light source groups, the camera, and the one or more memories,
- wherein each of the one or more first images acquired by capturing, with the camera, light beams irradiated from the one or more light source groups and reflected by a substrate on which an object is not coated, and
- wherein the one or more processors are configured to acquire a second image by controlling a first light source group among the one or more light source groups and the camera and irradiating light beams to the substrate on which the object is coated, and determine a coating state of the object based on the one or more first images and the second image.
A method, comprising:
- acquiring, by one or more processors, one or more first images stored in one or more memories;
- controlling, by the one or more processors, a first light source group among the one or more light source groups to irradiate light beams to a substrate on which an object is coated;
- controlling, by the one or more processors, the camera to capture the light beams reflected by the substrate on which the object is coated and acquire a second image;
- and
- determining, by the one or more processors, a coating state of the object based on the one or more first images and the second image,
- wherein each of the one or more first images acquired by capturing, with a camera, light beams irradiated from the one or more light source groups and reflected by the substrate on which the object is not coated.
A non-transitory computer-readable recording medium that stores instructions to be executed on a computer, the instructions configured to allow, when executed, one or more processors to:
- acquire one or more first images stored in one or more memories, each of the one or more first images acquired by capturing, with a camera, light beams irradiated from one or more light source groups and reflected by a substrate on which an object is not coated;
- control a first light source group among the one or more light source groups and the camera to irradiate light beams to the substrate on which the object is coated, and acquire a second image;
- and
- determine a coating state of the object based on the one or more first images and the second image.
Dependencies are inferred from the claim text.