Operating method for a group of pressure sensors
AssigneeInficon GmbH
InventorsChristian BERG, Rolf ENDERES, Martin WÜEST, Bernhard ANDREAUS
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AssigneeInficon GmbH
InventorsChristian BERG, Rolf ENDERES, Martin WÜEST, Bernhard ANDREAUS
Estimating the term…
A method for operating a group of pressure sensors is provided. First and second pressure sensors respectively have first and second pressure measurement ranges, and are arranged to measure the pressure in a common measurement volume, and have measurement ranges that overlap in a range. The method comprises: aa) reading out first and second measurement signals respectively from the first and second pressure sensors substantially simultaneously while the pressure in the common measurement volume is in the overlapping range; bb) stipulating the first measurement signal which has been read out as the adjustment point for the second pressure sensor; cc) determining at least one calibration parameter, in particular a gas-dependent calibration parameter, for the second pressure sensor as a function of the first measurement signal, as a function of the adjustment point for the second pressure sensor, as stipulated in bb), and as a function of the second measurement signal.
Method (100) for operating a group (1) of pressure sensors,
Dependencies are inferred from the claim text.