Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (mfcs) of a substrate processing system

A method of conducting a calibration operation on a plurality of mass flow controllers of a substrate processing system, the method comprising:

• selecting a first mass flow controller from the plurality of mass flow controllers according to a rank list of the plurality of mass flow controllers that is prioritized based on an operation time of each mass flow controller;
• and
• calibrating the first mass flow controller by:
• flowing a gas through the first mass flow controller at a target flow rate;
• stepping the target flow rate of the gas through a plurality of flow rates corresponding to a plurality of setpoints;
• verifying a measured flow rate of the gas at each of the plurality of setpoints using a mass flow verifier;
• and
• for each setpoint:
• determining a flow ratio of the measured flow rate relative to the target flow rate, and
• determining a corrected flow rate that corrects the measured flow rate.

A method of conducting a calibration operation on a plurality of mass flow controllers of a substrate processing system, the method comprising:

• monitoring an operational parameter of each mass flow controller of the plurality of mass flow controllers;
• generating a prioritized rank list of the plurality of mass flow controllers according to the operational parameter;
• selecting a first mass flow controller from the plurality of mass flow controllers according to the prioritized rank list of the plurality of mass flow controllers;
• and
• calibrating the first mass flow controller by:
• flowing a gas through the first mass flow controller at a target flow rate;
• stepping the target flow rate of the gas through a plurality of flow rates corresponding to a plurality of setpoints;
• and
• verifying a measured flow rate of the gas at each of the plurality of setpoints using a mass flow verifier.