Heat-transferring valve flexure and methods
AssigneeLam Research Corporation
InventorKarl Frederick Leeser
Life of this patent
Estimating the term…
Abstract
In some examples, a valve flexure for a flow control valve is provided. An example valve flexure comprises a first diaphragm; a second diaphragm, the second diaphragm directly or indirectly connected to the first diaphragm about a peripheral portion of the valve flexure, the connected first and second diaphragms enclosing an inner volume of the valve flexure; and a heat transfer medium disposed within the inner volume of the valve flexure.
Claims32
A valve flexure for a flow control valve, the valve flexure comprising:
- a first diaphragm;
- a second diaphragm, the second diaphragm directly or indirectly connected to the first diaphragm about a peripheral portion of the valve flexure, the connected first and second diaphragms enclosing an inner volume of the valve flexure;
- and
- a heat transfer medium disposed within the inner volume of the valve flexure.
A flow control valve comprising:
- an inlet to admit a gas or vapor into the valve;
- an outlet to discharge the gas or vapor from the valve;
- a valve flexure to open or close the valve, the valve flexure movable to seat on and unseat from a valve seal located between the inlet and outlet of the valve;
- a periphery of the valve flexure connected to one or more valve components, the connection defining or partitioning out an atmospheric side of the flow control valve;
- and
- an interstitial liquid located above the valve flexure, the interstitial liquid occupying, on the atmospheric side of the valve, at least some interstitial spaces adjacent or between the one or more valve components of the valve.
A method of implementing a substrate processing system, the method including:
- installing a flow control valve in the processing system, the flow control valve including:
- an inlet to admit a gas or vapor into the flow control valve;
- an outlet to discharge the gas or vapor from the flow control valve;
- a valve flexure to open or close the flow control valve, the valve flexure movable to seat on and unseat from a valve seal located between the inlet and outlet of the flow control valve;
- and
- a periphery of the valve flexure connected to one or more valve components, the connection defining or partitioning out an atmospheric side of the flow control valve;
- the method further comprising:
- providing an interstitial liquid located above the valve flexure, the interstitial liquid occupying, on the atmospheric side of the valve, at least some interstitial spaces adjacent or between the one or more valve components of the valve.
(canceled)
Dependencies are inferred from the claim text.