Laser processing system having optical diffraction tomography function

Abstract

The invention provides a laser processing system having the function of optical diffraction tomography, comprising: an integrated imaging optical path and a processing optical path; the imaging optical path is used to perform optical diffraction tomography on the device to be processed; the processing optical path is used for processing the device to be processed. Moreover, the specific optical path structure is introduced. During the processing of the device to be processed, the laser processing system can also perform real-time imaging of the device to be processed without shifting the device to be processed. That is to say, the laser processing and imaging processing of the device to be processed can be realized at the same time in a laser processing system.

Dependencies are inferred from the claim text.