Enhanced mosfet with superior rf performance
AssigneeQUALCOMM Incorporated
InventorsAbhijeet PAUL, Ravi Pramod Kumar VEDULA, Hyunchul JUNG
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Abstract
Disclosed is a transistor of a device that has an asymmetric resistance or an asymmetric capacitive coupling or both. When used in a cascode configuration in an amplifier, low current performance of the amplifier is improved. Asymmetric resistance may be enabled through differentially doping source and drain structures of the transistor and/or through differentially manipulating geometries the source and drain structures. Asymmetric capacitive coupling may be enabled through providing dielectrics and differentially locating the dielectrics above a gate of the transistor. Further, a body of the transistor may be biased.
Claims29
A transistor, comprising:
- a first dielectric layer on an implant layer;
- a source contact, a drain contact, and a gate structure within the first dielectric layer, the gate structure being between the source contact and the drain contact and comprising a gate oxide, a gate on the gate oxide, a source side spacer on sides of the gate and the gate oxide facing the source contact, and a drain side spacer on sides of the gate and the gate oxide facing the drain contact;
- a source implant structure within the implant layer and electrically coupled with the source contact, the source implant structure comprising a source well below the source contact, a source extension extending from the source well to below at least a portion of the source side spacer, and a source halo below the source extension and vertically overlapping at least a part of the source side spacer;
- and
- a drain implant structure within the implant layer and electrically coupled with the drain contact, the drain implant structure comprising a drain well below the drain contact, a drain extension extending from the drain well to below at least a portion of the drain side spacer, and a drain halo below the drain extension and vertically overlapping at least a part of the drain side spacer,
- wherein the transistor has an asymmetric resistance or an asymmetric capacitive coupling or both, the asymmetric resistance being when a resistance of the drain implant structure is different from a resistance of the source implant structure, and the asymmetric capacitive coupling being when a capacitive coupling between the gate and the source contact is different from a capacitive coupling between the gate and the drain contact.
A method of fabricating a transistor, the method comprising:
- forming a first dielectric layer on an implant layer,
- forming a source contact, a drain contact, and a gate structure within the first dielectric layer, the gate structure being between the source contact and the drain contact and comprising a gate oxide, a gate on the gate oxide, a source side spacer on sides of the gate and the gate oxide facing the source contact, and a drain side spacer on sides of the gate and the gate oxide facing the drain contact;
- forming a source implant structure within the implant layer and electrically coupled with the source contact, the source implant structure comprising a source well below the source contact, a source extension extending from the source well to below at least a portion of the source side spacer, and a source halo below the source extension and vertically overlapping at least a part of the source side spacer;
- and
- forming a drain implant structure within the implant layer and electrically coupled with the drain contact, the drain implant structure comprising a drain well below the drain contact, a drain extension extending from the drain well to below at least a portion of the drain side spacer, and a drain halo below the drain extension and vertically overlapping at least a part of the drain side spacer,
- wherein the transistor has an asymmetric resistance or an asymmetric capacitive coupling or both, the asymmetric resistance being when a resistance of the drain implant structure is different from a resistance of the source implant structure, and the asymmetric capacitive coupling being when a capacitive coupling between the gate and the source contact is different from a capacitive coupling between the gate and the drain contact.
An amplifier comprising:
- an amplifying transistor, a source of the amplifying transistor being configured to receive a low voltage, and a gate of the amplifying transistor being configured to receive an input voltage;
- and
- a cascode transistor, a source of the cascode transistor being configured to connect with a drain of the amplifying transistor, a gate of the cascode transistor being configured to receive a bias voltage, and a drain of the cascode transistor being configured to output an amplified version of the input voltage,
- wherein the cascode transistor has an asymmetric resistance or an asymmetric capacitive coupling or both, the asymmetric resistance of a transistor being when a resistance of a drain of the transistor is different from a resistance of a source of the transistor, and the asymmetric capacitive coupling of a transistor being when a capacitive coupling between a gate and a source of the transistor is different from a capacitive coupling between the gate and a drain of the transistor.
Dependencies are inferred from the claim text.